Vacuum Valves

7G Gate Door Valve Specification and distinctive features Product operates by pneumatic control (From ATM to VAC) Protect exposing the particle with separated movement and lubrication from the working area Possible to make a non-standard size High sealing reliability Application : Common industrial, LCD and PDP line, etc. Leak rate is better than 2 x 10-9 scc/sec Dimension Data Part No./Size A B C D E F ISYS-GD-01 2700 540 202 1970 120 750 The above table figures can be changed for the improvement of product performance. The Size of flange may be adjusted from the request of user. Outline Drawing Rectangular Gate Valve Specification and distinctive features Lighter than competitor's valve of same size Easy maintenance and small vibration Possible to make a non-standard size Using of forward and backward pressure Leak rate is better than 2 x 10-9 scc/sec Long life time : More than 1,000,000 times Dimension Data Part No./Size A B C D E F G ISYS-G-01 167.5 432.5 304 114 800 609 110 ISYS-G-02 280 816 662 340 1120 880 120 ISYS-G-03 270 590 845 280 1580 1430 130 ISYS-G-04 255 545 599 250 2101 1900 130 ISYS-G-05 230 500 550 200 2340 2120 130 2" x 10" 75 145 180 51 395 254 80 3" x 12" 90 160 190 76 445 305 80 The above table figures can be changed for the improvement of product performance The size of flange may be adjusted from the request of user. Outline Drawing Circular Valve Specification and distinctive features Lighter than competitor's valve of same size Easy maintenance and low vibration Possible to make non-standard size Using both forward and backward pressure Leak rate is better than 2 x 10-9 scc/sec Long life time : More than 1,000,000 times Dimension Data Part No./ Size A B C D E F G ISYS RG01 145 241.3 279.4 420 430 80 990 ISYS RG02 261 320 350 500 490 90 1165 ISYS RG03 300 370 406 565 540 100 1310 ISYS RG04 400 480 510 720 650 130 1625 The above table figures can be changed for the improvement of product performance. The size of flange may be adjusted from the request of user. Outline drawing Throttle Valve Specification and distinctive features Reduced thickness for non interference with other parts (Small-sized and light-weighed products) Rapid respond velocity Manual, pneumatic and full auto control Possible to make a non-standard size Application : PVD system Leak rate is better than 2 x 10-9 scc/sec Dimension Data Part No./ Size A B C D E ATV-12 406.4 362 203.2 541.6 60 ATV-10 335 310 304.1 471.6 60 ATV-8 279.4 241.3 276.3 416 60 ATV-6 228.6 190.5 250.9 365.2 60 The above table figures can be changed for the improvement of product performance. The size of flange may be adjusted from the request of user. Outline Drawing

Vacuum Valves product offered by ISYS Inc.